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He wanted to be neutral and that wasn't allowed.
“We are friends of Russia, and we are also friends of the United States. We are friends of China and Europe. We are not part of any alliance.”
ASML's EUV mirrors made by Zeiss have a surface that is so flat the imperfections are measured on the picometer scale, or a trillionth of a meter. This is equivalent to keeping an area the size of California as flat as a human hair.
Everyone associates ASML, a relatively obscure Dutch company, with EUV Lithography, but here's a good list of the other companies also supporting this emerging market that made the AI era possible.
EUV scanners gobble up hydrogen.
With the first high-NA EUV system shipped, we are starting to see more pictures of what an assembled system looks like. No, I'm not talking about a big white box we were used to seeing inside fabs or CAD cartoon drawings, but real pictures of the
They've created a monster.
- 4 trillion transistors
- 900,000 AI cores
- 125 petaflops of peak AI performance
- 44GB on-chip SRAM
- 5nm TSMC process
- External memory: 1.5TB, 12TB, or 1.2PB
- Trains AI models up to 24 trillion parameters
- Cluster size of up to 2048 CS-3 systems
TechWar: China's Lithography Problem.
China's Shanghai Micro Electronics Equipment Group Co., Ltd. (SMEE) won't be able to make a sanctions-busting immersion scanner in the next decade, and I will explain exactly why. This is not a putdown on China's technological capabilities;
TSMC's Complimentary Field Effect Transistors (CFETs)—some of the geometries in this image are on the single-digit nanometer scale. You could fit about 150 of these cubes inside a red blood cell and each one contains 24 transistors. That's a total of 3600, litho frens can check
LAM just dropped a whitepaper on scaling Flash Memory to 1000+ layers using Cryogenic Dry Etch processing. That's an impressive SEM image at the right. Flawless.
State of the Art Lithography.
Fresh High-NA EUV results from imec/ASML. These are 9.5 nanometer lines here, after pattern xfer into (presumably) a hardmask like SiN or SOG. It's tone inverted for metal, so I'd guess a negative Metal Oxide Photoresist was used. This was done with
First on-chip laser array: Photonics chips have limited scalability bc they currently need an external light source. This is a way around that barrier. These nanoscale lasers are only 400nm wide. Impressive SEM image! 😍
Rumor has it ASML will stop servicing Chinese immersion scanners below (in red) starting next year. Some of them are >10 years old already. That's a huge number of tools and it can't be allowed to happen given the dollar value we are talking about here. ASML will have to offer a
AI-era Marvels:
ASML's mag-lev stages can accelerate up to 15G. For comparison, modern fighter jets operate no greater than 10G. These tools are used to pattern chip components on the nanometer scale. At these speeds, the stages are still capable of maintaining a positional
What does it mean to "tape out" a microchip?
Tape out refers to making the master circuit patterns that are used to mass-produce semiconductor devices. This lingo originally referred to the large spools of tape (at left) that stored all the data that would write the image of the
Nanoimprint finds a real semiconductor application.
Micron shared a talk yesterday on how NIL could be used for certain DRAM layers. They set this up by showing a trend where what's called "chop" layers are increasing for DRAM nodes and going below the resolution for immersion
imec demonstrates Copper Hybrid Wafer Bonding down to 400nm pitch interconnect. That'd be about 6.2 million connections per square millimeter. Impressive! It looks like the placement error is on the order of +/- 50nm.
🌎 Litho World Record.
Researchers in Switzerland used an EUV test system to pattern down to the 6 nanometer half pitch. They used an optical trick called interference lithography, so it's not commercially viable. This method has been used to test the resolution of photoresist
This is a new image of the Velhoven High-NA EUV tool assembly that I just saw today. It was in a Tom's Hardware article crediting ASML. It shows the ASML team performing the last part of the installation, which is dropping the upper part of the tool with the cleanroom crane. The
SK Hynix will begin shipping 400 layer NAND Flash Memory next year using hybrid wafer bonding. The described method patterns the memory cell and peripheral circuitry on different wafers, then bonds them together in the packaging process.
How ASML became
#1
: Printing Economics.
The lens system inside a scanner is the single most expensive tool component in a semiconductor fab. Back in the early 2000s, ASML released their TwinScan platform to address the growing need to maximize a fab's investment in scanner
xMEMS just released the first fan-on-chip micromachine for cooling mobile device chips. It is just 1 mm thick, makes no sounds, and can be top- or side-ventilated.
🇯🇵 Lasertec's new high-NA EUV mask inspection tool will also use a larger anamorphic lens to match 🇳🇱 ASML's scanner.
Source: August 12th, 🇰🇷 Samsung Electronics, Dr. Min Cheol-gi's presentation slides at the 2024 Next Generation Lithography + Patterning Conference in Suwon,
Intel published 450Mb of detailed plans for their Magdeburg, Germany, site online. Fab 29.1 and Fab 29.2 will be high-NA EUV capable fabs with an operational start in Q4 2027.